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STI (Systems Technology Inc.) has gained high marks in the world market for its high-end chemical delivery systems (CDS). With international certifications like ISO 14001 and ISO 9001, the company has exported CDSs mainly to China, Taiwan and Malaysia.
Among the maker’s hot-selling CDS products are mixing & supply systems, slurry supply systems and chemical delivery systems. Fully automatic, the firm’s mixing & supply system monitors chemical concentration, flow rate and supply pressure. It is used at mixing and supply process for semiconductor and TFT LCD
factories. It is also suitable for developers of various chemicals like TMAH, BHF, SC-1, KOH and C/F.
Slurry supply system from the company is used for CMP (Chemical Mechanical Planarization) process. Fully automatic, it dilutes slurries with water and mix them with other chemicals. It effectively monitors conductivity, flow rate and pressure. Its chemical supply is controlled by loop flow.
The firm’s chemical delivery systems feature fully automatic operation and ensure no metal contamination and no particle generation.
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