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STI (Systems Technology Inc.) has so far gained high marks in the world market for its high-end chemical delivery systems (CDSs). Driven by such international certifications as ISO 14001 and ISO 9001 and several overseas offices, the company has shown continuously growing export performance, mainly to China, Taiwan, Malaysia, Singapore, and the United States markets.
Among the maker’s hot-selling CDS products are mixing & supply systems, slurry supply systems and chemical delivery systems. Fully automatic, the firm’s mixing & supply system monitors chemical concentration, flow rate and supply pressure. It is used in the mixing and supply process for semiconductor, TFT LCD, and photovoltaic factories. It is also suitable for developers of various chemicals like TMAH, DHF, and KOH.
The slurry supply system from the company is used for CMP (Chemical Mechanical Planarization) process. Fully automatic, it dilutes slurries with water and mixes them with other chemicals. It effectively monitors conductivity, flow rate and pressure. Its chemical supply is controlled by loop flow. The firm’s chemical delivery systems feature fully automatic operation and ensure no metal contamination and no particle generation.
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