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SDPCVD (Space Divided Plasma Chemical Vapor Deposition)

[SDPCVD (Space Divided Plasma Chemical Vapor Deposition)]
Developed by Jusung Engineering, SDPCVD (Space Divided Plasma Chemical
Vapor Deposition) is considered to be one of the most advanced and promising
technologies as the system can handle all of the deposition processes by PECVD,
LPCVD and ALD.
SDPCVD can replace PECVD and LPCVD at the same time. In combination with
new-concept plasma technology, the SDPCVD provides improved productivity up to
twice than PECVD and LPCVD. It is an innovative system designed to manage
quality film coating even the temperature is below 400° by maximizing the merits of
the ALD system and tackling PECVD system’s drawback of wafer damage from plasma.
Given the large global market for PECVD, the LPCVD and ALD systems that the SDPCVD system can be replaced
with amounts to about US$6 billion, the SDPCVD market is expected to rapidly catch up.
JUSUNG, which presented the SDPCVD system for the first time in SEMICON Korea that was held in Seoul earlier
this year, will forge ahead with promoting its products overseas.
Jusung Engineering Co. Ltd. is a leading semiconductor equipment company that engages in developing,
manufacturing, and selling semiconductor, display, and solar cell equipment in Korea. JUSUNG has internationally
appreciated deposition technology which refers to a series of electrical film coating processes for display and solar cell
and LED . OLED and is considered to be the crucial factor in deciding quality of the end products.
Developed by Jusung Engineering, SDPCVD (Space Divided Plasma Chemical Vapor Deposition) is considered to be one of the most advanced and promising technologies as the system can handle all of the deposition processes by PECVD, LPCVD and ALD. SDPCVD can replace PECVD and LPCVD at the same time. In combination with new-concept plasma technology, the SDPCVD provides improved productivity up to twice than PECVD and LPCVD. It is an innovative system designed to manage quality film coating even the temperature is below 400° by maximizing the merits of the ALD system and tackling PECVD system’s drawback of wafer damage from plasma. Given the large global market for PECVD, the LPCVD and ALD systems that the SDPCVD system can be replaced with amounts to about US$6 billion, the SDPCVD market is expected to rapidly catch up. JUSUNG, which presented the SDPCVD system for the first time in SEMICON Korea that was held in Seoul earlier this year, will forge ahead with promoting its products overseas. Jusung Engineering Co. Ltd. is a leading semiconductor equipment company that engages in developing, manufacturing, and selling semiconductor, display, and solar cell equipment in Korea. JUSUNG has internationally appreciated deposition technology which refers to a series of electrical film coating processes for display and solar cell and LED . OLED and is considered to be the crucial factor in deciding quality of the end products.
49, Neungpyeong-ri, Ope-eup, Gwangju, Gyeonggi-do, Korea
E-mail: ir@jusung.com
Tel: 82-31) 760-7000
Fax: 82-31) 760-7070
Website: www.jseng.com
 
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